JPH0194470U - - Google Patents
Info
- Publication number
- JPH0194470U JPH0194470U JP18974987U JP18974987U JPH0194470U JP H0194470 U JPH0194470 U JP H0194470U JP 18974987 U JP18974987 U JP 18974987U JP 18974987 U JP18974987 U JP 18974987U JP H0194470 U JPH0194470 U JP H0194470U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- chamber
- opening
- liquid phase
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18974987U JPH0194470U (en]) | 1987-12-14 | 1987-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18974987U JPH0194470U (en]) | 1987-12-14 | 1987-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0194470U true JPH0194470U (en]) | 1989-06-21 |
Family
ID=31480763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18974987U Pending JPH0194470U (en]) | 1987-12-14 | 1987-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0194470U (en]) |
-
1987
- 1987-12-14 JP JP18974987U patent/JPH0194470U/ja active Pending